以射頻磁控濺鍍法製作氧化鋅鋁薄膜之退火效應研究及其除冰應用

Study of annealing effect on AZO Thin Films prepared by RF Sputtering and Deicing

本文主要是在討論氧化鋅鋁加熱器，氧化鋅鋁加熱器在成本、電性、光學性質以及應用是具有挑戰性的。本實驗是透過濺鍍後加熱之後，探討增加電極之後改善另外的效果和性能。我們對L型電極的氧化鋅鋁薄膜鍍上二氧化矽保護層，在溫升實驗，鍍上保護層的L型電極的氧化鋅鋁薄膜溫升速率和薄膜溫度有下降的情形，但是可以發現薄膜的可見光穿透率提升86.57%，薄膜的溫升也產生熱擴散，由此可知在L型的時候，指叉電極的改善效過是最好的以電力驅動的透明加熱器廣泛應用在許多工業、公通工具與電子產品，而透明加熱器是在可見光區域有高穿透率，以及高的導電性質。

 

AZO heaters are challenging in terms of cost, electrical, optical properties and application. In this experiment is after diathermy and passing through, mainly discussing the effect and performance of the change after adding electric shock . We plated the SiO2 protective layer on the L type electrode AZO thin film. In the temperature rise experiment, the thin film temperature rise rate and thin film temperature of the L type electrode AZO thin film coated with the protective layer decreased, but it can be found that the visible transmittance of the thin film is increased by 86.57%, and the temperature rise of the thin film also produces thermal diffusion. It can be seen that the improvement effect 1:1 is the best at the time of L type. Transparent heaters driven by electricity are widely used in many industries, public tools and electronic products, and transparent heaters have high transmittance in the visible light region and high electrical conductivity.