渦輪分子幫浦性能設計分析

計算流體力學技術近幾年來成功的應用於渦輪分子幫浦的性能設計分析中，並廣泛的為全世界各大真空幫浦生廠商所採用，可大幅減少新型幫浦開發的時程及費用。本論文將此設計分析方法作一扼要的回顧，並說明採用此法時所需之原理及相關流程步驟，包含統御方程式、計算區域的訂定、計算網格的設置、邊界條件的設定、數值計算程序及數據分析技巧等，並以實際之案例作說明，以使讀者能更方便的應用此技術。此外並以實驗量測的方法來驗證數值計算的正確性，包含幫浦的抽氣性能曲線及內部壓力分佈等。由各項結果可以得知，使用計算流體力學的技術可以在幫浦進行初步設計時就得到幫浦的抽氣性能曲線，並以計算所得的詳細流場及壓力場資料可以進行幫浦設計的細部修正，大幅減少新幫浦開發之相關費用及時程。

Computational fluid dynamics technique has been successfully applied to the functional design analysis of turbomolecular pump in the recent years and widely used by vacuum pump manufacturers around the world. The technique can significantly reduce the time and cost spent on development of new pumps. This paper reviews the design analysis and further explains the concepts and procedures of the technique, including governing equation, setting of computing area and computing grid, numerical computation function, and data analysis techniques, along with case study to manifest this technique. Experimental measurement is taken to prove the accuracy of the data, including pumping speed curve and internal pressure distribution of the pump. The results prove that use of the computational fluid dynamics technique can obtain the pumping speed curve at initial design stage, and the detailed flow and pressure computed can be used to modify the design. As a result, the time and cost spent on development of new pump can be significantly reduced.