微機電慣性參考系統

MEMS IRU

由於半導體技術的快速發展，使得以半導體技術為基礎的微機電感測器得以問世；且其具備體積小、成本低、功耗低等優點，因此備廣泛用於各種民用與軍用領域上。然而由於微機電感測器的精度較低，進而限制微機電感測器於高精度導航和控制的適用性。

Due to the rapid development in semiconductor technology, MEMS (microelectromechanical system)-based sensors have been widely used in commercial and military applications. These sensors are characterized by their small size, low cost, low power consumption. However, MEMS sensors are noted for their low accuracy, limiting the applicability in high precision navigation and control. NSPO self-developed MEMS IRU (inertial reference unit) adopts a gyroscope cluster (16 3-axis gyroscopes) approach and optimal data fusion method to account for the limitation of MEMS sensors in terms of accuracy and reliability. Since the temperature variation affects the MEMS-based output in a nonlinear manner, a calibration curve was built into the processing model through offline data analysis. NSPO team has completed MEMS IRU Engineering Qualification Model (EOM). Moreover, the MEMS IRU, which can be integrated with NSPO self-developed multi gyro-stelar Inertial Attitude Estimate (IAE) to meet the requirement of the high accuracy remote sensing satellite mission.