以微陽極導引電鍍法於氯化膽鹼離子液體中析鍍鎳之研究

A Study on Ni-microcolumns Formed in the Ionic Liquid of Choline Chloride Using the MAGE Process

本文自含鎳之氯化膽鹼／乙二醇離子液體系統中，利用微陽極導引法進行微電鍍研究。藉由改變偏壓與間距等析鍍參數，討論其對析鍍行為之影響，除了以掃描式電子顯微鏡觀察析鍍物之形貌外，進一步利用析鍍電流監測，以及採用有限元素法之電場模擬等資料，從電場強度、電荷交換及質傳速率等差異，來理解離子液體微電鍍之動力學。自本離子液體中析鍍所得之鎳沉積物呈瘤狀堆積。析鍍偏壓增加會提高電場強度，提高析鍍電流，加速電荷交換。兩極間距增加則會導致電場強度減弱，降低析鍍電流，減緩電荷交換速率。析鍍電流大小亦會影響沉積物之形貌，電流提高會使沉積物上之瘤狀物變小而表面顆粒變粗。經ANSYS軟體之電場模擬，鎳於該離子液體之臨界析鍍電場為134±30 V/m。

Micro-anode guided electroplating (MAGE) of nickel in the bath of a choline chloride/ ethylene glycol ionic liquid system has been investigated. Experimental parameters such as electrical bias and gap between two electrodes were deliberately altered to explore their influence on the morphology of the Ni deposits. Electron scanning microscopy (SEM) was used to examine the morphology of the deposits. The current during the depositing process was monitored. Finite element analysis was employed to help understand the electroplating mechanism of MAGE in the ionic liquid system by examining changes in electric field strength, electron transfer process and mass transfer rate.