冷電漿沉積有機膜在不銹鋼表面以提升其耐蝕性

Cold Plasma Deposition Organic Film on Stainless Steel to Improve Corrosion Resistance

不銹鋼因具有良好的機械強度和導電性質而被廣泛應用在生醫材料上。然而，當不銹鋼長期置入生體內會產生腐蝕及金屬離子溶釋（dissolution）等現象，且因本身不具生物適應性而影響其生醫用途。為改善上述缺點，本實驗利用化學氣相沉積法在不銹鋼表面沉積六㆙基㆓矽胺烷（Hexamethyldisilazane; HMDSZ）以形成保護膜後，再進一步利用氧電漿或空氣爐氧化處理，探討其耐蝕性。極化曲線之結果顯示不銹鋼表面經電漿沉積HMDSZ膜可提升其抗蝕性，再經氧電漿或空氣爐氧化處理者則否。進一步探討電漿沉積膜的抗蝕性，其中以20W處理20min者可獲致最佳之抗蝕性。由水接觸角測量顯示，經電漿沉積處理後其表面變為疏水性，再經氧化處理後則變為親水性。

Recently, metal stent or wire were widely used in biomaterials fields due to their good mechanical strength and electric conductive properties. However, they were corroded in moisture atmosphere and non-biocompatible will limited their medical application. It could be improved by surface modification. Cold plasma polymerized organic layers is one of the surface modification methods that have many advantageous properties, as e.g. good adhesion to most substrates, excellent uniformity and thickness control, no pin-hole formation. Their elemental composition and their physical and chemical properties can be varied in a wide range. In this study, we use plasma deposition methods to obtain insulator and anticorrosion films. The result showed that HMDSZ plasma deposition on stainless steel surface becomes hydrophobic, but through oxygen plasma post-treatment or air heat treatment become hydrophilic. The polarization curves showed that corrosion resistance can be enhanced by HMDSZ plasma deposition while it decrease after oxygen plasma processing or air furnace thermal degradation.