| 英文摘要 |
In recent years, emerging Micro-Electro-Mechanical Systems (MEMS) technology and micromachining techniques have been a popular approach to the miniaturization of sensors. More importantly, the functionality and reliability of these micro-sensors has been increased considerably by integrating them with mature logic IC technology or other sensors. TO effectively gauge the weather, it is essential to gather data, such as temperature, humidity, air pressure, airflow direction and velocity over a wide area. Previous studies have reported on the use of MEMS sensors for monitoring individual weather parameters, such as pressure [1], flow rate [2,3], humidity [4,5], temperature, and multi-parameters (two or more) [6-10]. |
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