高科技廠庫板牆系統耐震性能與破壞預測

Seismic Behavior and Damage Prediction of High-tech Fab Cleanroom Partition Walls

Cleanroom partition walls play a fundamental role in Taiwan's advanced cleanrooms. However, during the Meinong earthquake that struck southern Taiwan on 6th February 2016, these partition walls sustained significant damage, leading to the shutdown of the cleanroom and production line, causing severe financial losses. This study focuses on investigating the out-of-plane performance of cleanroom partition walls.
To assess the out-of-plane performance of different screw layout partition walls, we conducted a single-direction push-over experiment. Through this experiment, we collected valuable data on the partition walls' behavior in response to lateral forces. Subsequently, we developed a finite element analysis (FEA) model using ANSYS to simulate the buckling deformation shape and force of the partition walls.
For dynamic analysis, we observed that the partition walls retained their elastic behavior after failure. Consequently, we employed the mode superposition (MSUP) analysis method for the transient model. To validate the accuracy of the transient model, we compared its output with data obtained from a full-scale partition wall shake table experiment conducted in 2021.
Utilizing the validated model, we derived a ceiling acceleration and frequency failure prediction curve specific to cleanroom partition walls. This curve provides crucial insights into the performance limitations of cleanroom partition walls under seismic events, aiding in designing safer and more resilient cleanroom facilities.
In conclusion, this study addresses the critical issue of cleanroom partition wall performance during seismic events. By combining experimental and numerical approaches, we contribute to enhancing the understanding of the partition walls' behavior, which is crucial for mitigating potential damage and financial losses in cleanroom facilities during earthquakes.