| 英文摘要 |
An in-situ measurement technique to gauge surface roughness of ultra-precision machining with optical characteristic effects is critical and isachieved without a probe to avoid contact damage on the surface. Becausethe plastic lens molding reprints the roughness from the mold corefabricated by machining, the tool marks induce a poor surface on the plasticlens. The machined surface reflects the input light from an He-Ne laserof the wavelength of 632.8 nanometers. Several samples made ofelectrolyte-less nickel and aluminum with different surface roughnesseswere created by varying the feed rate of ultra-precision machining, andtheir surface roughnesses were measured with the red He-Ne laser. A1 × 15 photo-diode array with a pitch of 1.6 mm was constructed to measurethe distribution of the optical scattering effect under the He-Ne laserlight source. The results show that the increased surface roughness causesa wider light scattering distribution. In addition, the light scattering effectfrom the machined surface is proportional to roughness. Using the ratioof the main and side measuring channels of the photo-diode array is a suitableapproach to construct the relationship between the light scattering and surface roughness. The increased ratio means the surface roughness decreases.The ratio of reflective specular light intensity to that behind thesub-channel is clearly related to the surface roughness. The curve fittingis close to the experimental results subject to the larger value of R2.Therefore, the laser and the photodiode array predict the roughnesses of theultra-precision machined surfaces of aluminum well. The online roughnessmeasurement technique using the reflected light scattering effect froman ultra-precision machined surface is constructed in this study. |
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