半導體廠黃光區空氣中有機混存物分析方法

Analytical method for workplace airborne organics in semiconductor photolithographic processes

本研究選擇於半導體黃光區中用量較大之五種勞委會列管化合物：丙酮、異丙醇、乙酸正丁酯、二甲苯和乙二醇單乙醚醋酸酯為建立分析參考方法之研究對象，期能提供代檢服務業或工廠作為例行環境檢測方法之參考。活性碳管100（mg/50mg）和被動式採樣器分別為採集介質，並以氣相層析儀測試分析。結果以活性碳管配合內含5％（v/v）2-丁醇之二硫化碳的組合所得脫附效率較佳。在混合狀態下五種化合物之脫附效率約為93％至101％，且變異係數小於3.5％。於22°C , 50％相對濕度及200mL/min之採樣流量率下，建議之最大採樣體積為9.6L。於5°C：冷藏貯放條件下，混合樣品15天後之回收率除丙酮外均可達90％以上。本方法除已由其他兩家認可實驗室驗證確認外，亦已實際應用於現場之環境測定。

An analytical method for workplace airborne organics in semiconductor photolithographic processes was developed. Acetone, isopropyl alcohol, n-butyl acetate, xylene and 2-ethoxyethyl acetate were the target chemicals. Activated charcoal tube (100mg/50mg) and passive monitor were used as sampling media, and samples were analyzed by gas chromatography equipped with a flame ionization detector. Results indicated that charcoal-tube samples desorbed by CS2 with 5%(v/v) 2-butanol was the best combination to obtain better desoption efficiences in this study. The average desorption efficiencies of these five organics, in mixtures ranged from 93% to 101%, and their coefficients of variation were less than 3.5%. The recommended maximum sampling volume was 9.6 L on the condition of 200 mL/min sampling flow rate, 22°C and 50% relative humidity. The recovery of collected mixutres on charcoal tubes, except acetone, was over 90% under 5°C storage for 15 days . This method had been validated by two other laboratories and been successfully applied to semiconductor workplace monitoring.