鍍類鑽碳膜304不鏽鋼之磨耗性質研究

Abrasion Properties of Diamond-like Carbon Coating on 304 Stainless Steel

本研究以乙炔為主要的反應氣體，利用電漿輔助化學氣相沈積法製作類鑽碳薄膜披覆於於滑蓋手機的滑軌材料304不鏽鋼上，而其中所沉積的不同膜厚類鑽碳分別為：1、2及2.5μm。實驗以RCA耐磨測試機、Rockwell硬度實驗機、SRV往復式磨耗試驗機和顯微拉曼光譜儀進行耐磨耗性、附著度、摩擦係數、磨耗壽命及拉曼I(D)/I(G)比的試驗，並利用環境掃描式電子顯微鏡來觀察304不鏽鋼磨耗後的情況。實驗結果發現，鍍有類鑽碳膜比傳統銀或黑烤漆的304不鏽鋼有較低的摩擦係數、更高的耐磨耗性、更高的附著度及較佳的磨耗壽命。此外，由於2μm類鑽碳膜的石墨化現象較嚴重，而使得鍍膜產生潤滑的效果，因而造成該膜厚的磨耗壽命比2.5μm鑽碳膜厚的磨耗壽命高。

In this study, by using C2H2 as the reaction gas, a plasma-enhanced chemical vapor deposition method was used to coat diamond-like carbon onto 304 stainless steel for use in cell phones. Three thicknesses of the diamond-like carbon film were examined：1, 2 and 2.5 μm. An RCA wear resistance machine, Rockwell hardness testing machine, SRV reciprocating wear-testing machine, and a Raman spectrometer were used to conduct wear-resistance, adhesion, coefficient-of-friction, wear-life, and I(D)/I(G) ratio tests. In addition, an environmental scanning electron microscope was used to observe the abrasion of the 304 stainless steel. The experimental results showed that the 304 stainless steel with diamond-like carbon coating had a lower coefficient of friction, higher wear resistance, higher adhesion, and longer wear life. In addition, a lubricating effect was observed because of severe graphitization of the 2-μm diamond-like carbon film. Therefore, its wear life was higher than that of the 2.5-μm diamond-like carbon film.