Recent Progress of Vacuum Technology in ITRC, NARL

The research and development of vacuum technology in Taiwan traces its history back to the founding of vacuum technology laboratory of Instrument Technology Research Center, National Applied Research Laboratories in 1977. Over these years, its central function has been the development of vacuum instrument by providing researchers with the opportunity to conduct independent and creative research at the forefront of vacuum science and engineering. The laboratory's strong record of achievement is solidly based on its ability to relate new developments and advances to vacuum technology, its success in incorporating these advances into research programs, and its close relationship with academic and industry. The aim of the present article is to introduce the recent progress of vacuum technology in this laboratory which has recently expanded into three divisions, and each division is related to specific industrial needs. These include: (1) thin films materials science and engineering, (2) nanostructured materials process, and (3) vacuum pressure and gas flow rate calibration. Finally, future challenges and wide applications of vacuum technology will be discussed.