Towards Multifunctional Photonic Integrated Circuits: MBE-grown Epitaxial Structures and Processes

A photonic IC platform based on modulation doped quantum wells (QW) on InP substrate with reduced demand on epitaxial regrowth is being developed. Selective areas of this base wafer that is designed for either TE-mode or polarization insensitive operation will be blue shifted by QW intermixing for the fabrication of low-loss waveguide parts that can be tuned by electrorefraction. For electrical isolation between devices, the top p player in some segments of the waveguide will be replaced by a high-resistivity material through regrowth.