奈米電子元件

資訊的獲取、放大、儲存、處理、傳輸、轉換、顯示等，任何一樣都離不開電子元件，微電子元件技術早已經成為人類主要經濟的命脈。至於奈米電子元件未來的發展，將以更小且更快為目標：「更小」是指進一步提高晶片中電子元件的積集度，「更快」是實現更高的資訊運算和處理速度。在奈米電子元件的發展中，與現有積體電路製程的相容性，已成為能否成功開發出奈米電子元件的重要因素。本文針對目前較被廣泛研究的三種奈米電子元件：奈米尺度金氧半場效電晶體（Nano-scale MOSFET）、奈米晶體非揮發性記憶體元件（Nano-crystal nonvolatile memory device）及單電子電晶體（Single Electron Transistor, SET）作一簡要的敘述。

Electronic device is necessary for information accession, amplification, storage, process, transport, transfer and display. The microelectronic device technology has become the important part of global economy. The future trend of nano-electronic devices is much smaller and speedier. Smaller device can enhance the density of nano-electronic integrated circuit. High speed device can reduce the information processing time. In this article, we will introduce three important nano-electronic device: Nano-scale MOSFET, Nano-crystal nonvolatile memory device and Single Electron Transistor.