指叉狀電極應用於透明導電膜之溫升研究

A Transparent Conductive Layer with an Interdigitated Electrode and Its Effect on Heat Generation

在這篇論文中，基於銦錫氧化物(ITO)加熱裝置依然存在許多問題，為了解決問題，本論文使用不同比例的指叉狀電極遮罩來蒸鍍電極在ITO上，並對其做深入研究。
在我們會使用到熱蒸鍍機，並以鋁作為電極，蒸鍍在ITO玻璃上，使用不比例的指叉狀遮罩來蒸鍍鋁於ITO的系統，其中指叉狀電極的比例分別為為1:1(sample02)，2:1(sample03)，3:2(sample04)，以及無指叉狀的電極(sample01)，而在這次的實驗中，我們所改變的參數只有指叉狀電極的比例，其他的參數則沒有改變，鋁圈數量是固定四圈，蒸鍍環境也都是固定的真空值，蒸鍍電流則是固定在70A，以便探討不同電極的影響。
在蒸鍍結束後，我們分別對不同比例指叉狀電極的樣品進行電學特性以及溫升的量測，結果表明1:1的電阻值約為68Ω，溫升速率約為0.617°C/s，2:1的電阻值約為100Ω，溫升速率約為0.335°C/s，3:2的電阻值約為100Ω，溫升速率約為0.314°C/s，1:1的電阻值是最小的，溫升速率是最快的，相較於其它比例的樣品是最高的，在蒸鍍不同指叉狀電極的時候，並不是電極數越多越好，而要考慮有效發熱面積與其他因素。

In this paper, based on the existing ITO heating device, the effect is not as good as expected. Therefore, we use different types of metal masks to evaporate the electrode on a single layer of indium tin oxide (ITO). Do in-depth research, and this experiment is mainly divided into two parts.
In the first part, we will use a thermal evaporator, and use aluminum as the electrode to evaporate on the ITO glass, and use a non-proportional interdigitated mask to evaporate the aluminum on the ITO system. The proportion of the interdigitated electrode is They are 1:1 (sample2), 2:1 (sample3), 3:2 (sample4), and non-digital electrodes (sample1). In this experiment, the only parameter we changed was the fingers. The ratio of the shaped electrodes and other parameters have not changed. The number of aluminum circles is fixed four circles, the evaporation environment is also a fixed vacuum value, and the evaporation current is fixed at 70A to explore the influence of different electrodes.
After the evaporation, we measured the electrical characteristics and temperature rise of samples with different ratios of interdigitated electrodes. The results showed that the 1:1 resistance value is about 68Ω, and the temperature rise rate is about 0.617°C/s. 2:1 resistance value is about 100Ω, temperature rise rate is about 0.335°C/s, 3:2 resistance value is about 100Ω, temperature rise rate is about 0.314°C/s, 1:1 resistance value is the smallest Yes, the temperature rise rate is the fastest, which is the highest compared to other proportions of samples. When evaporating different interdigitated electrodes, it is not that the more electrodes are better, but the effective heating area and other factor.