原子層沉積製程技術於能源材料之應用

Applications of Atomic Layer Deposition on Energy Materials

近年來隨著地球資源過度開發以及全球暖化加劇，開發再生且乾淨並能持續使用之再生能源受到廣泛的重視，本研究團隊利用原子層沉積（atomic layer deposition, ALD）技術具有極佳覆蓋率並可在奈米尺度下準確控制厚度等特點，製備及修飾能源材料，應用於光電化學水解產氫以及鋰離子電池。初步研究結果顯示經由ALD製備及修飾之能源材料其效能皆有所提升。

Developments of clean, renewable and sustainable energy have been received more attentions due to the limited natural resources and serious global warming in earth. In this study, atomic layer deposition (ALD) with excellent coating conformity and precise thickness control in atomic scale is proposed to fabricate and modify energy materials, applying for photocatalytic water splitting for hydrogen generation and lithium ion battery. Preliminary study shows that the performances of the energy materials are improved.