採用噴墨印刷與壓合技術製作多層濾波器於液晶聚合物基板之研究

Multilayer Bandpass Filter on Liquid Crystal Polymer Substrates Using Inkjet Printing and Lamination Bonding Technologies

噴墨印刷技術有別於傳統黃光微影製程，將數位化的圖案直接寫入於基板上，具備新型態工業製造之低成本、製程快速及低汙染等優點，同時對於基板的選擇性廣，特別是軟板上的電路整合，此外，可利用熱壓合技術進行多層堆疊，以達到整合與封裝的目的。本研究利用噴墨印刷與熱壓合技術製作射頻濾波器於液晶聚合物基板，利用表面形貌與電性來萃取製程參數，包括基板表面親疏水性、噴墨及多層壓合參數與烘烤溫度等，根據最佳化參數製作高頻濾波器，以驗證開發之噴墨印刷與熱壓合技術。 Inkjet printing technology, unlike the traditional photolithography technique, has been adopted for digital images to direct write layered patterns into substrate. The advantages of inkjet printing are cost-efficient, fast, and environmentally friendly make it as an emerging industrial technique. Moreover, inkjet printing technology provides wider selections of substrates, particularly integrated circuit on fl exible substrates. Additionally, combining inkjet printing and lamination bonding technologies achieves multilayer integrated circuit for system-on-package technologies. This study developed inkjet printing and lamination bonding technologies to realize radio frequency filters on liquid crystal polymers substrates. The process conditions including surface wettability, inkjet printing and lamination bonding parameters, and sintering temperature were examined surface morphologies and electrical properties. Based on the optimal parameters, multilayer bandpass filter was fabricated to demonstrate the inkjet printing and lamination bonding technologies.