| 中文摘要 |
本文簡介真空儀器科技相關真空元件、設備、薄膜製程及真空檢校等技術領域之研究歷程並展望未來方向。
The development of vacuum instrument such as device, equipment, thin film process, and vacuum calibration followed by the introduction to future direction in vacuum science and technology was described. |
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