台灣光子源(TPS) 真空系統建造與技術

Construction of the Vacuum Systems and the Technologies for the Taiwan Photon Source(TPS)

台灣光子源（TPS）為能量30億電子伏特的同步加速器光源，以產生最高亮度的軟X光與硬X光提供實驗研究。TPS主體的電子儲存環為一座周長518.4米的超高真空系統，區分24個長直段（7米或12米）與偏轉段（14米）真空系統分段，電子束軌道真空腔以鋁合金材料製造為主。24組14米偏轉段真空系統完全在無塵室中組合、銲接、組裝真空元件、真空烘烤達到超高真空後密封。在TPS隧道區內先吊運安裝14米偏轉段至支架上固定後再安裝中間長直段真空系統烘烤完成。本文將介紹TPS真空系統建造、元件製造與安裝技術。 Taiwan Photon Source(TPS) is an accelerator-synchrotron light source of 3 GeV in energy which delivers high brilliant Soft X-ray and Hard X-ray for experimental researches. The electron storage ring, major part of the TPS, is an ultrahigh vacuum(UHV) system of 518.4 m in circumference divided into 24 super-periods each contains a long-straight section, 7 m or 12 m in length, and a 14 m arc-cell section. Aluminum alloys were adopted for the electron beam ducts. All the 24 sets of 14 m arc-cell vacuum systems were entirely produced in-house in the clean room including the works in series of assembling, welding, installation of vacuum components, vacuum baking to the UHV, and sealed. Each arc-cell was transported to the TPS-tunnel and installed on the girder supports, and then the long straight sections be installed and baked to the UHV. Methodologies of the construction for the TPS vacuum systems, the components, and the installation techniques will be described in this article.