中文摘要 |
適值國家實驗研究院儀器科技研究中心「科儀新知」發行第200期紀念專刊,謹以本文回顧儀科中心於自主化關鍵真空儀器科技之研發歷程並展望未來方向。
On the eve of the 200th instruments today of ITRC, NARL, we would like to review the accomplishment on vacuum instrument, followed by the introduction to future direction in vacuum technology of ITRC, NARL. |