蠕動微型幫浦用UV固化膠粘劑的製作

Fabrication of a Peristaltic Micropump with UV

本文使用UV 固化膠粘劑（NOA81）作為粘接材料和微結構材料，來製造蠕動式微型泵。NOA81 的最高強度是要接受10.18 焦耳／平方米的能量後達到，以UV 燈之強度換算是在7 分鐘時間的紫外線固 化，而在參數最佳化發現，後續加上50℃、12 小時的加熱板加熱．會比單純光照更穩定；其次以 NOA81 做為微結構需的研究，本實驗測試的固化時間包括1 分鐘，5 分鐘，至60 分鐘。根據該測量， 為10 分鐘的樣品最佳，其幾何誤差為低於最大耐受（10%），而其他較短和較長的固化時間分別為 10%以上。在顯微鏡下觀測到在流道位置，最大的實驗量測標準差為4.611 微米，對於腔室位置深度的 標準偏差為0.514 微米，這是非常小的。它顯示了NOA81 在製造微流體的流道和腔室在幾何形狀的一致 性與轉印時幾何形狀的忠實度。此外，本研究使用刀片試驗來驗證NOA81 的接合強度，利用以表面能 公式將裂紋長度計算出粘接強度。最後，應用於製造蠕動式微型泵，並測試其效能。實驗結果微型泵的 最高薄膜位移和流量分別是0.824 微米和21.87 微升／分鐘，而最大背壓為4.42 帕．與前期研究相同設計 的PMMA 熱壓型微型泵相較，此型的流量較小，因為該微型泵的通道較淺。另外，NOA81 材料具有比 PMMA 材料低的楊氏係數，在致動過程中，NOA81 結構變形也造成較小的背壓。

This study fabricates a peristaltic micropump using UV curable adhesive (NOA81) as bonding material and microchannel structure. First of all, the highest bonding strength of NOA81 is 10.18 J/m2, achieved at 7 minutes by UV. The micropump's main body was fully cured for 7 minutes and heated on a hotplate for 12 hours at 50oC for stabilization. Secondly, the curing times for these experiments include 1 minute, 5 minutes, up to 60 minutes. According to the measurements, geometrical errors for 10 minute samples were below the maximum tolerance (10%), while the other samples were above 10%. Standard deviation for each target area was compared. For channel area, the biggest standard deviation is 4.611 μm, while standard deviation for chamber area is 0.514 μm, and these values are very small compared to depth values. This shows the consistency of the NOA81 to replicate microstructure. Razor blade test was utilized to measure NOA81 bonding strength. Finally, the pump performance fabricated by NOA81 with optimal curing process was tested. The highest membrane displacement and flow rate of the NOA81 based micropump are 0.824 μm and 21.87 μl/min, respectively, while the maximum backpressure is 4.42 Pa. The flow rate is small because the micropump's channels are shallow and the shallow channels will produce high fluidic resistance. NOA81 structure also has low Young's Modulus. During actuation process, the NOA81 with low Young's Modulus structure undergoes a deformation, also making the backpressure smaller.