運用塑膠熱壓參數法於微型幫浦之最佳化設計

Using Taguchi Method to Optimize the Parameters of PMMA Hot-embossing When Manufacturing Plastic Micro-pumps

本研究應用熱固性高分子材料，不飽和聚酯樹酯(Unsaturated Polyester; UP)來取代電鑄鎳模仁的技術，製作一個新型的微流道模仁，再熱壓於PMMA基板上，並製作成微型幫浦。再以UP為模仁完成後，採用田口式理論分析來達到UP模仁熱壓PMMA基板的最佳化控制之製程參設計，經由田口法最佳化得到，要使UP模仁熱壓PMMA時，PMMA具有較好的尺寸轉寫保真度，其最佳參數為上板150℃、下板60℃、熱壓3分鐘、施加力量0.5公噸，可以達到最好的轉寫率；而若要保持UP模仁的耐用度則最佳參數為上板150℃、下板50℃、熱壓4分鐘、施加力量0.5公噸，可以降低UP模仁熱壓後尺寸的變化。最後，將UP模仁熱壓PMMA基板後所製作的微幫浦測其效能，其呈現在驅動電壓100 Vpp時，UP模仁之幫浦於500 Hz時則有最大流量111.2µl/min；固定頻率400Hz與電壓100 Vpp測試時，UP模仁熱壓之幫浦其最高背壓則為5.9 Pa，證實整個實驗結果確實可行。

A thermoset polymer material, Unsaturated Polyester (UP), was used to replace a standard nickel mold to create a new type of microfluidic master. This UP mold hot embosses the PMMA substrate and was used to make a micropump. The quality of the pump’s performance was subsequently verified. First, a Taguchi design analysis was used to create a hot embossed PMMA substrate. Using a system based on the Taguchi method, it was experimentally discovered that the optimal PMMA size transformation is achieved when operation parameters of 150 ℃, 60 ℃, 3 minutes, and 0.5 tons for upper plate temperature, bottom plate temperature, duration and applied pressure, respectively. For best durability of the UP master, the optimum parameters are 150 ℃, 50 ℃, 4minutes, and 0.5 tons for upper plate temperature, bottom plate temperature, duration and applied pressure, respectively. Finally, the micropump based on this optimal parameter fabrication process has maximum flow 111.2μl/min when the voltage is 100 Vpp at 500 Hz. The maximum back pressure is 5.9 Pa, when the voltage 100 Vpp at 400 Hz.