以二硫化鉬為前驅物利用化學氣相沉積法合成氮化鉬

Synthesis of MoN by Chemical Vapor Deposition Using MoS2 as a Precursor

過渡金屬二硫屬化物（TMDCs）作為二維材料在物理和化學性質方面具有重要的作用和應用，例如能量存儲、傳感器、電子元件和催化。此外，製備TMDCs的方法很多，其中最主流的是使用CVD，它已成為原子級薄膜的主流製備方法來沉積二硫化鉬（MoS2）。近幾年科學家也開始探討MXenes，其中MXene包含了過渡金屬碳化物（Transition Metal Carbides, TMCs）與過渡金屬氮化物（Transition Metal Nitride, TMNs），自從2011年科學家發現二維Ti3C2這種TMC材料開始，目前已經合成出超過30多種不同組成之MXenes材料，相較於TMDCs，MXenes有更優異的導電度、光催化特性、高儲能特性與能量轉換效率等突出的物理與化學性質，然而二維碳化物在研究發展上目前已經趨近飽和，相較之下，二維氮化物成為一種更新穎且令研究家感到好奇之材料。本文透過大面積MoS2進行硫的置換從而嘗試得到大面積的氮化鉬（MoN）。

Transition metal dichalcogenides (TMDCs) are 2D materials with important physical and chemical properties for energy storage, sensors, electronic components, and catalysis. Furthermore, there are numerous methods for preparing TMDCs, the most common being the use of CVD, which has become the standard preparation method for atomic-scale thin films to deposit molybdenum disulfide (MoS2). Scientists have recently begun to discuss MXenes, which contain transition metal carbides (Transition Metal Carbides, TMCs) and transition metal nitrides (Transition Metal Nitride, TMNs). Since the 2011 discovery of two-dimensional Ti3C2 TMC materials. Currently, more than 30 MXenes of various compositions have been synthesized. MXenes have superior physical and chemical properties, such as superior electrical conductivity, photocatalytic properties, high energy storage properties, and energy conversion efficiency, when compared to TMDCs. However, two-dimensional carbides are nearing the end of their research and development cycle. Two-dimensional nitrides, on the other hand, have emerged as a more novel and intriguing material for researchers. The main goal of this paper is to create large-area molybdenum nitride (MoN) by replacing NH3 with large-area MoS2.