| 英文摘要 |
In this study, indium gallium zinc oxide (IGZO) was selected as a sensing material for a thin film fabricated on a PET substrateby radio frequency (R.F.) sputtering. The following temperature effects, hysteresis effects and drift effects of the IGZO pH sensorwere investigated. The temperatures were set at 15°C, 25°C, 35°C, 45°C and 55°C, respectively. The arrayed flexible IGZO pHsensor was able to operate within a wide temperature range and the best average sensitivity was recorded as 59.893 mV/pH with thetemperature set at 55°C. Furthermore, the drift rate and hysteresis voltage at different temperatures were less than 9.857 mV/hr and25.316 mV, respectively; the arrayed flexible IGZO pH sensor was found to have good stability. In the future, it could replace theuse of litmus paper to detect pH values in various fields such as in the field of chemistry and in the food industry. |
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