應用PZT結合快速影像處理於微米等級3D形貌的顯微量測

3D Surface Profiling Measurement Based on PZT Using Binning Method in Microscopy

在非接觸式光學量測技術中，測量範圍會受到景深大小的限制。本研究藉由整合PZT平台與多重高度影像融合技術，可以精確的描繪出階梯樣本的高度形貌。研究架構由PZT、顯微鏡和CCD相機所組成。當PZT移動固定距離時，CCD相機會即時擷取一張圖像。在擷取多張樣本時，使用多重高度影像融合技術來重建三維形貌影像。並藉由影像濾波演算法去除多餘的影像雜訊。此外為了提高影像擷取的效率，使用Binning技術使相機降低取像所需時間，以加快整體實驗速度。

In the non-contact optical measurement techniques, the depth of field limits the range of the measurement. In this study, by integrating PZT stage and multiple-height image fusion, that can precisely define the height discontinuity of the step height sample. The system setup is composed of the PZT, the microscope, and the CCD camera. The CCD camera periodically captures one image when the PZT stage moves a fixed distance. After a lot of the images of the step height sample are captured, the multiple-height image fusion is used to reconstruct the 3D image surface profile, and the image filter is used to process image noise. In order to improve the speed of the capturing image process, the binning function is used.