晶片上力感測樑之數值分析

Numerical Analysis of the Force Sensor Beam of the Chip

The concept of chips originated in the late 1980s when many Euramerican research units realized that the development and application of chips, a comprehensive result of microelectronics, micromechanics, life science and biological message, would definitely bring about in the 21st century a biotechnology revolution. Chip research is still in its early stages of development, but there have been many great achievements thus far, such as the Gene Chip, DNA Chip or Microarray, Protein Chip, Micro-fluidics and multifunctional Lab-on-a-chip. The primary focus of this paper is the numerical analysis of force measurement on chips, which deduces the relation of the system through changing the spring constant, damping constant and Young's modulus of different materials. Finally, it puts forward a numerical example for calculation and explanation. All these results can serve as reference for future chip designs and improvements?