金屬氧化物半導體氣體感測器用材料回顧

Semiconducting Metal Oxide Gas Sensor Materials: A Review

隨著科技產業的進步帶動了全世界工業與都市發展。然而，這些發展所產生的氣體造成的環境影響與對人們的危害日趨明顯。尤其是以燃油移動式交通工具、工廠排放等所造成的因素佔大宗。長時間下來將使得人們遭受疾病與災害的威脅，其影響層面涵蓋人們的呼吸、腦神經、心血管等系統。發展感測器技術將有助於偵測與預測汙染來源。根據國際知名市調機構Yole Development預估，氣體感測器使用量將提升300倍，產值將超過20億美元（至2021年）。金屬氧化物半導體式氣體感測器具有成本低、壽命長、可微小化、可大量生產、易整合於矽基製程等特色與優點。未來有機會整合於各類行動式裝置（如手機、平板電腦等產品）因此，採用半導體式的氣體感測器相關技術將備受矚目。本文將針對金屬氧化物半導體氣體感測器製程、原理及感測材料進行介紹，作為給讀者未來發展氣體感測器相關產品參考。
With the advancement of the science and technology industry, it has driven the development of industry and cities around the world. However, the environmental impact and harm to people caused by the gases produced by these developments are becoming more and more obvious. In particular, the factors caused by fuel mobile vehicles and factory emissions account for a large proportion. For a long time, people will be threatened by diseases and disasters, and its impact level covers people's breathing, cerebral nerves, cardiovascular and other systems. The development of sensor technology will help to detect and predict the source of pollution. According to Yole Development, a well-known international market research agency, the use of gas sensors will increase 300 times, and the output value will exceed 2 billion US dollars. (until 2021). Semiconductor metal oxide (SMO) gas sensors have the characteristics and advantages of low cost, long life, miniaturization, mass production, and easy integration into silicon-based processes. There will have the opportunity to be integrated into various mobile devices (such as mobile phones and tablet computers) in the future. Therefore, technologies related to the use of semiconductor-type gas sensors will attract much attention. This article will introduce the manufacturing process, principles and sensing materials of SMO gas sensors, as a reference for readers to develop gas sensor related products in the future.