Effects of Deposition Temperature on the Properties of Ga-Doped ZnO Thin Films

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篇名	Effects of Deposition Temperature on the Properties of Ga-Doped ZnO Thin Films
作者	Fang-Hsing Wang (Fang-Hsing Wang)、Hua-Tz Tzeng (Hua-Tz Tzeng)、Chia-Cheng Huang (Chia-Cheng Huang)
英文摘要	A compound of 97wt% ZnO and 3wt% Ga2O3 (GZO) was sintered at 1400ºC as a target and deposited on glass using a radio frequency magnetron sputtering system. The effects of deposition temperature (from room temperature, RT, to ~300ºC) on the crystallization
起訖頁	7-12
關鍵詞	Sputtering、Deposition Temperature、Optical Transmission Spectrum
刊名	Journal of Science and Innovation
期數	201401 (4:1期)
出版單位	臺灣知識創新學會
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