Investigated the Performance of MgZnO Ultraviolet Photodetectors Using Magnetron RF Sputtering System

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篇名	Investigated the Performance of MgZnO Ultraviolet Photodetectors Using Magnetron RF Sputtering System
作者	Hsin-Ying Lee (Hsin-Ying Lee)、Yu-Chang Lin (Yu-Chang Lin)
英文摘要	In this work, the magnetron RF sputtering system was used to deposit the MgxZn1–xO films with various Mg content. The MSM-UPDs based on the sputtering-deposited MgxZn1-xO were also fabricated and characterized. From the reported experimental results of th
起訖頁	139-142
關鍵詞	RF sputtering system、MgxZn1–xO MSM-UPDs
刊名	Journal of Science and Innovation
期數	201310 (3:4期)
出版單位	臺灣知識創新學會
該期刊-上一篇	Based on Tire Pressure Monitor System Analysis to Design Energy Harvester