Characterization of AZOY Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

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篇名	Characterization of AZOY Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering
作者	Yung-Yu Chen (Yung-Yu Chen)、Chia-Hao Yang (Chia-Hao Yang)、Rwei-Ching Chang (Rwei-Ching Chang)
英文摘要	Recently, a novel aluminum doped zinc oxide (AZO) film, named AZOY, has attracted much attention due to comparable resistivity and optical transmission with indium tin oxide (ITO) films. Therefore, in this paper, the AZOY films are deposited on glass and
起訖頁	191-199
關鍵詞	Aluminum Doped Zinc Oxide、AZOY、Sputtering、Room Temperature
刊名	Journal of Science and Innovation
期數	201210 (2:4期)
出版單位	臺灣知識創新學會
該期刊-下一篇	Strain Fields and Transition Energies in Multilayer InGaAs/GaAs Semiconductor Quantum Dots