應用於CIGS薄膜太陽能電池的陣列取像裝置及檢測系統

An Image Capturing Array Device and Inspection System for CIGS Thin Film Solar Cells

太陽能電池是作為光電能源轉換的重要基本元件，而光電轉換效率與製造成本是最重要的兩大關鍵因素。CIGS薄膜太陽能電池可以節省大量原料又具可撓特性，寬廣的吸收光譜範圍與18%以上的光電轉換效率，被認為具有很好的發展潛力。CIGS薄膜電池在生產製程中會經過3道劃線製作程序，包括雷射劃線與機械劃線，但可能出現劃線的線寬或線距的變化，劃線扭曲，劃線深度不足或崩裂等等不良現象。傳統抽樣離線檢查已不能符合現今量產需求，薄膜電池製造商急需能與產線製程結合的線上全檢系統。因此，設計開發一套陣列式光學取像裝置與檢測系統，作為CIGS薄膜電池的線上全檢AOI系統。該AOI系統設計配置4組取像模組與高亮度線型光源，對長約1200mm´寬約600mm的大型薄膜太陽能板進行快速數位化掃描與影像處理分析，單片太陽能板的AOI作業流程能在60秒以內完成，完全符合生產線上的速度要求，整套AOI系統的穩健性與檢測精確性同時通過產線驗證。

Photovoltaic conversion effi ciency and manufacturing cost are the two most crucial factors for solar cells. Because CIGS thin fi lm has excellent properties such as material saving, fl exibility, wide absorption spectrum range and photovoltaic conversion effi ciency of 18% or more, it is suitable as an absorber layer of solar cells. There are three scribing procedures during the production processes of CIGS thin-fi lm solar cells, including laser and mechanical scribing which might cause line width and spacing variations, broken and twisted lines as well as insuffi cient line depth. However, the traditional offl ine sampling inspection cannot meet the demands for the mass production of solar cells. Therefore, an online image capturing array device and inspection system (an AOI system) has been proposed and developed for the production line of CIGS thin-fi lm solar cells. The AOI system, which equips four sets of image capturing modules and an equal number of high-brightness linear light sources, has performed fast digital scanning and image processing of large-scale solar panels (1200 mm x 600 mm). The inspection duration of one single solar panel must be within 60 seconds, which meets the requirement. The robustness, as well as the accuracy of the AOI system, has also been verifi ed by the practical production lines.