An Experimental Study of Seismic Protective Systems for Retrofit of Microelectronics Factories

An Experimental Study of Seismic Protective Systems for Retrofit of Microelectronics Factories

Considering the weakness of the existing microelectronics factories such as the inverted pendulum deformation shape of standard fabs and the soft and/or weak stories of the double fabs, viscous dampers which can increase the system damping ratio and also modify the lateral deformation shape of the structure may be an effective passive control device to minimize the damage potential of earthquake to these valuable structures and facilities. In particular, it has been proved that viscous dampers may also be beneficial to the micro-vibration control of the fab structures. Two three-story steel structures are used to respectively simulate the interior structures of a standard fab and a double fab. An experimental study is conducted using shaking table test for the two structures added with viscous dampers. A rolling type floor isolation system is also implemented to further protect the valuable manufacturing facilities housed in the fab structure. Experimental results have revealed that a significant improvement on the seismic performance of the structures after the viscous dampers and rolling type floor isolation system are implemented.