中文摘要 |
利用條紋投影(fringe projection)技術進行物體表面的三維形貌量測,是十分普遍的作法,本文除了介紹其量測原理,亦藉由公式推導,證明此技術亦可進行待測物各局部區域的三維速度、及三維形變量量測,甚至與形變有關的量測,例如三維熱膨脹系數、物表溫度分佈、表面駐波的分佈等,都可透過這項技術完成。在目前眾多形貌檢測技術中,是唯一一種僅由一張擷取影像,即可達到上述多項功能的光學檢測技術。
Profile measurements performed by fringe projection techniques have been commonly studied for a while. In this article, we extent its applications to the fi elds of velocity sensing and deformation inspection. Advantages of the proposed method include:(1) capacity of non-scanning and full-field measurements,(2) system simplicity,(3) fast measurement speed,(4) easiness for calibration, and(5) low environmental vulnerability(a major problem for interferometers) . Only one-shot measurement is required for data processing. The full-fi eld property makes it possible to inspect several objects at the same time. |