應用於三維感測的垂直共振腔面射型雷射陣列

Intensive Care Unit Acquired Weakness

在本文中我們對垂直共振腔面射型雷射陣列在三維感測，其姿勢監測的應用做一簡單的回顧。我們也對此種元件和其主要的競爭對手：側面發射的高功率分佈式回饋的雷射，就其工作原理和特性表現做一分析比較。除此之外，我們也對同調和非同調的雷射陣列做了介紹。文章的最後也闡明了我們研發團隊所開發的鋅擴散和氧化掏離技術，並展示了利用此種技術所製造的高性能近同調垂直共振腔面射型雷射陣列。 In this paper, we briefly review the applications of vertical-cavity surface-emitting lasers(VCSELs) array for 3D sensing and gesture monitoring. We compare its working principles and device performances with those of the edge-emitting high-power distributed feedback(DFB) laser, which is the major competitor of VCSEL array for the above-mentioned applications. Besides, we discuss the difference between coherent and non-coherent VCSEL array. In the end of this article, we illustrate the Zn-diffusion and oxide-relief techniques developed by our research group and demonstrate the high performance quasi-coherent VCSEL array based on these two techniques.