精密光學工程技術發展

Precision Optical Engineering in ITRC

儀器科技研究中心發展光學工程技術已歷40年，主要光學應用包含:教學顯微鏡自製與遙測取像儀之光學系統等國家任務，以及學術研究所需客製光學元件與模組；近年更積極將其光學工程技術應用至半導體製造設備與精密機械與量測產業。本文將說明儀器科技研究中心光學工程技術之發展背景與歷程，包含傳統光學拋光技術、超精密加工技術與電腦數值控制拋光技術；並針對近年重點發展之超精密加工技術與大口徑非球面製作與檢測技術作詳細介紹。 Instrument technology research center(ITRC) has developed optical technology to support academic research activities and national missions for 40 years since 1974. ITRC also dedicates its optical technology to industrial application recently, such as semiconductor manufacturing equipment, and precision machining and metrology systems. This paper presents the optical technology roadmap in ITRC and the current developments of ultra-precision machining and large optics fabrication and testing.