建立簡單、快速及低成本之精密機具空間定位檢測儀器

The Development of One Simple, High Speed and Low Cost Positioning Test System for Precision Machine

本精密機具之定位檢測為精密機具檢測出廠前最重要的檢測項目之一，傳統的檢測方法需要大量的時間，或者是昂貴的設備（如雷射干涉儀等）。本研究使用16顆四象限位置感測器（QD）及雷射光源建立精密機具校正設備。目前位置感測器已經廣泛應用於定位檢測，但使用大量位置感測器的儀器並不多見，因為商用的位置感測器訊號處理器價格昂貴。本研究完成建立位置感測器平板校正系統及三軸工具機三維空間定位檢測方法，並建立取代商用級位置感測器訊號處理器之電路模組，以達到建立簡易、高精度及低成本之量測系統。平板校正結果顯示，本研究所建立之系統的量測精度優於1μm。

The positioning test is a important test item in precision machine fabrication. The conventional test method takes much time and needs expensive instrument (such as a laser interferometer). This project used 16 quadrant detectors (QD) and one laser diode to build one novel measurement system. Position sensing detectors are frequently used in positioning tests. Because commercial signal amplifiers for position sensing detectors are expensive, using many position sensing detectors in one instrument is not the common usage. In order to reduce the cost, 16 position sensing detector signal amplifiers were fabricated in this project. This study built one position sensing detector plate and used it to test a 3-axes machine tool. The accuracy of our system was better than 1μm.