利用有限元素法于壓電式微切割刀動態分析

FINITE ELEMENT DYNAMIC ANALYSIS OF A MICROCUTTER WITH A PZT ACTUATOR

本研究主要是利用有限元素法於生物醫學工程中，被廣泛使用以矽為基底的壓電式微切割刀系統分析。利用壓電致動具有高精密度、易控制、及省能源等多項優點，同時可藉由微機電製造技術進行結構微小化。本研究首先針對一壓電懸臂施加不同電壓下之靜態分析，進行有限元素模擬結果與實驗比對，目的為確定壓電有限元素模式的準確性。其次，以矽為基材的刀具貼覆壓電材料，施加電壓後觀測位移變化量；對壓電微切割刀進行動態分析，探討激盪頻率與所對應的模態振型，爾後再對壓電微切割刀進行暫態分析，求得暫態響應圖，以提供學者或業界設計、研究及開發微切割刀或其他產品時更有效益。

This paper presents a piezoelectric drive concept that could be easily integrated into a silicon based microcutter . A simple cantilever beam integrated with a PZT actuator was simulated first, to test the accuracy of the FEM model. The results are compared to experiments and show good accuracy. Next, static and dynamic analyses of microcutter were performed to investigate the resonant frequency and displacement sensitivity by finite element methods. The transient response is also included in this study to realize the deflection of microcutter subjected to an exciting voltage input. Good dynamic characteristics were obtained.