LED製程化學清洗設備使用安全性調查

The Study of Safety Survey for Wet Bench in LED Process

國內LED產業之化學清洗設備(wet bench)無論在採購規格、操作以及維護保養等情況與一般半導體與光電產業之wet bench均有所差異，本研究針對LED產業使用之wet bench實施風險評估分析及使用安全性調查，主要目的在於提供該產業在採購、維修保養等查核基準。本研究針對化學清洗設備(wet bench)，進行使用安全性調查與風險評估分析。研究主要成果如下：1. 針對國內LED產業蒐集相關職災案例共15件，並進行災因分析；2. 針對國內LED產業6個廠進行wet bench使用安全性調查，並完成統計分析；3. 依照國內LED產業web bench使用狀況及需求將設備分成27種類型，並參照國內外相關法規與標準、蒐集之職災案例、以及產業設備使用安全調查結果，針對現場情況進行FTA與FMEA風險評估分析；4. FTA與FMEA風險評估的結果，可供國內LED產業在web bench設備之採購、操作與使用維護之參考基準。研究的建議如下：1. 國內LED產業wet bench設備採購主要以客製化為主，建議業者在採購、操作與維護上應多加注意電氣安全；2. 有關化學清洗槽系統運作之管理及安全措施，建議須有一套評估化學品不相容性之標準作業流程，及設定操作人員權限，並確保維修作業或異常狀況排除時之互鎖功能。

In terms of procurement requirements, operation, and maintenance, the wet benches used in domestic LED industry are very different from those used in the semiconductor and optoelectronic industries. This study conducted hazard analysis and safety investigation on wet benches in LED industry with the aim of providing LED industry with checking standards for wet bench procurement and maintenance. The results are as follows: 1. Fifteen occupational incidents in domestic LED industry were collected and analyzed; 2. Safety investigations on wet benches were conducted in six LED plants, and statistical analysis was completed; 3. Wet benches used by domestic LED industry were classified into 27 types according to their functions, and FTA/FMEA risk assessment were carried out through different types of equipment in reference to domestic and foreign regulations and standards, occupational incident cases collected, and the results of safety investigations; 4. The results of FTA/FMEA risk assessment can be used by LED industry as the checking standards for wet bench procurement, operation, and maintenance. The recommendations resulting from this study are as follows: 1. Domestic LED industry usually purchase customized wet bench equipment, it is recommended that more attention should be paid to electrical safety in the process of wet bench procurement, operation, and maintenance; 2. In regard to management and safety measures of wet bench system operation, it is recommended that standard operating procedures for assessing the incompatibility of chemicals and the process for authorizing operators to set operation conditions are established, and the interlock function is assured during maintenance and troubleshooting abnormal situations.