半導體、光電製程設備電氣安全規範

Electric Safety Standards for Semiconductor and Optoelectronics Process Equipment

本文彙整歐洲、北美「半導體與光電設備」之電氣安全規範。這些規範的內容，包括製程設備的設計、製造、安裝、操作及維護保養等項目。上述規範可以提供半導體與光電產業界，做為設備採購、檢驗及維修之安全基準，以改善工業安全與衛生，與降低電氣火災、爆炸或電擊的災害發生。同時，也提供國內電氣設備製造商設計與製造之參考。

This paper summarizes European/North American safety standards for electric equipment in the semiconductor and optoelectronics industry. These standards cover the design, manufacturing, installation, operation and maintenance of the process equipment. They standards should be used when purchasing equipment and should also be used when inspecting and maintaining equipment. These standards will definitely improve industrial health and safety and reduce the incident of electric fire, explosion or electric shock. These standards should be followed and manufacture of electric equipment by Taiwan marks.