半導體作業安全衛生危害之探討——SEMI安全指引與國內法規比較

The Study on Occupational Safety and Health Hazards in the Semiconductor Manufacturing Industry ―A Comparison Between SEMI Safety Guidelines and Domestic Regulations

半導體工業為我國近年來成長最為迅速的產業之一，也是在國際上較具競爭力之新興產業。然而根據許多統計資料顯示，半導體業勞工在工作場所中可能的潛在危害，包括各種化學性的有毒氣體、游離及非游離輻射、噪音與肌肉骨骼傷害等。這些潛在的危害顯示對於國內正積極發展的半導體業，亟需採取有效的危害防範對策。本研究乃針對半導體設備和材料協會（SEMI）所編印之11種半導體設備材料安全標準指引（SEMI Safety Guidelines S1-S11）之內容，與國內勞工安全衛生相關法規之制定精神及內容差異作一大體之比較，其結果認為國內業者應積極參與SEMI 等協會活動，及引進相關標準以補國內法規之不足，並應建立職業衛生管理制度資料，以利日後職業衛生問題發生之追蹤與處理。

The semiconductor industry is one of the fastest growing industries in Taiwan. It is also one of the newest and competitive industries in the world market. Semiconductor employees are exposed to many potential hazards in the workplace. The statistical data shown ranks these hazards as follows: toxic gases, ionizing radiation, non-ionizing radiation, noise and musculoskeletal disorders. It is necessary to adopt preventive strategies to reduce these potential hazards for workers in our country. The purpose of this study is to translate 11 facility standards and safety guidelines (S1- S11) of Semiconductor Equipment and Materials International (SEMI), and compare them with domestic occupational safety and health related regulations. The study shows that semiconductor manufacturers should take a more active role in participation in SEMI activities. They should also introduce related standards from other countries to revise the current domestic regulations. And they should establish a system to provide information about managing workplace hazards.