三種人因工程檢核表在半導體業之應用

Application of Ergonomic Checklists in the Semiconductor Industry

依據國內外對於半導體製造業累積性工作傷害現況調查顯示，半導體之從業人員於肩膀、手肘、下背、腿部等部位之肌肉骨骼不適症狀均有相當高之反應，且其比例均高於全產業與製造業之比例。因此，無論就保護勞工的立場，或為提昇營運績效而言，正視人因危害，尋求解決方案實在是有其需要。本研究主要以三種檢核工具：人因工程因素基準線風險認定檢核表（BRIEF）、肌肉骨骼傷害人因工程檢核表（MSDs），以及本研究依據半導體設備與原料協會（SEMI），關於人因工程部分的規範所擬定的半導體設備與原料協會指引檢核表。針對此三種檢核工具，參考相關的研究報告，透過工作分析與現場訪談，同時作現場的施用。並對照與本計劃相關的現場作業人員問卷調查資料，以評估此三種檢核工具施用於半導體製造作業現場之適用性，發現其特點與限制如下：若用以評估員工個別部位的肌肉骨骼傷害，則人因工程因素基準線風險認定檢核表具有較詳細的部位區分，適合重複性較高的工作循環，作綜合風險界定與評估。在肌肉骨骼傷害人因工程檢核表的使用上，較適用於整個作業班次的人因風險界限評估。就半導體工廠現場作業型態而言，肌肉骨骼傷害人因工程檢核表似有較高的適用性。依據SEMI規範所建立的SEMI導引檢核表，主要係對機台設備與工作環境所作的初步查核，有助於對機台設備與工作環境的佈置，作概略的了解。本研究結果顯示，以半導體工廠之使用而言，此三種檢核工具在使用範圍涵蓋面上，依序為SEMI導引＞MSDs＞BRIEF，在對人因危害評核的詳細程度上，則其次序恰好相反。

The semiconductor manufacturing industry is one of the important industrial sectors in Taiwan. The working population has increased drastically in the past ten years. Many investigations have indicated that semiconductor manufacturing workers have been exposed to more risk than others in musculoskeletal disorders and cumulative trauma disorders(CTD). Thus, it’s a must to focus on the ergonomic hazard prevention program to increase the productivity and improve health and safety of workers. In this study, three different kinds of checklists (BRIEF MSDs, and SEMI standards) were used to compare with the result of ergonomic hazard analysis conducted by investigators. Moreover, the results of checklist were compared with the results of questionnaires which had been conducted on 565 workers for musculoskeletal disorders survey. According to the ergonomic job analysis, the work repetitive motion of semiconductor manufacturing workers was not significant, but the risk factor in awkward postures and long working hours were serious. The results show that the checklist of BRIEF is an effective and rapid screening instrument to monitor the potential ergonomic risk of cumulative trauma disorders for upper arm. The BRIEF checklist is also an appropriate tool to evaluate CTDs symptom for workers. The checklist of MSDs is a more sensitive and useful tool in identifying the musculoskeletal disorder risk factors in semiconductor manufacturing plants. The SEMI checklist, developed from SEMI guideline, is a reliable tool to evaluate the plant layout and workstation design. However, it is not an appropriate tool for CTD inspection. SEMI, BRIEF, MSDs checklists, were originally developed for the population in USA or European countries, are not appropriate CTD inspection tools for the people in Taiwan because of differences in the anthropometric data of westerns are different from those in Taiwan. In the future, ergonomics professionals need to do more research to revise these checklists and develop domestic versions of SEMI, BRIEF or MSDs suitable for the workers in Taiwan.