半導體工業噪音狀況之調查

A Survey on Noise Exposure in the Semiconductor Industry

長時間暴露噪音環境產生之危害除導致聽力損失外，對心血管循環系統、消化系統、內分泌系統等皆會造成影響，產生煩躁、易怒、等情緒反應。機器運轉時噪音即伴隨產生，故噪音問題普遍存在於工廠中，半導體工業為我國近年來成長迅速的高科技新興產業，大批科技人才投入該產業之製程，且半導體勞工作業時間（12小時）不同於一般傳統工業勞工，為防範未然，特針對半導體工業各製程進行噪音狀況調查，暸解該工業勞工作業環境是否有噪音危害之存在。本研究旨在建立半導體工業各製程之噪音資料，於半導體廠進行量測分析，以暸解該工業各製程勞工作業環境之狀況。研究結果顯示半導體廠無塵室內各製程之噪音量皆小於80dBA（65.5-79.0dBA），部分工廠有封裝測試作業區，噪音量介於71.9-81.2dBA，雖然作業環境低於勞工安全衛生法之規定，及勞工健康保護規則之健檢標準，為使勞工因職業暴露導致聽力損失之發生機率降至最低仍應致力聽力保護計畫之推動。各製程真空幫浦區與廠務機房之噪音量超過85dBA，故應加強噪音區標示、防音防護具佩戴與相關教育訓練之推動。另外，由頻譜分析之結果發現，作業區域的噪音主要分布於低中頻率（1kHz以下）範圍，此一結果建議工程控制應著重於降低機台設備振動、或阻絕結構傳遞路徑來改善。

Besides hearing loss, noise may cause adverse emotional reactions, such as irritation, annoyance, due to some changes in cardiovascular, digestive and endocrine systems, etc. under long-term exposure in noisy environment. Noise usually comes with machine operations. It is a common problem in many factories. The hi-tech semiconductor industry has rapidly flourished in recent years in Taiwan, and many people have their careers in semiconductor companies. The working hours of each shift is 12 hours in the semiconductor industry, which is different from other industries. To understand if any noise hazard exists in semiconductor industry, and to further prevent the workers from hearing loss due to over-exposure to noise in workplace, it is necessary to conduct a study on noise exposure in the plant. The purpose of this study is to establish a database of process noise and labor's noise exposure in the semiconductor industry by performing noise survey. According to the findings, the sound pressure level of each process in clean room is less than 80dBA(65.5-79.0dBA). Some plants have product packagingltesting area, where its noise level can reaches up to 71.9-81.2dBA. Although such level still conforms to the Labor Safety and Health Law, Hearing Conservation Program to minimize the risk of noise-induced hearing loss for labors in the workplace is highly recommended. It also suggests using noise area label, adopting personal protector, and training for people who work in the vacuum pump area and factory utility section because these locations have sound pressure level higher than 85dBA. In addition, the results of octave-band analysis in mainlsub fabs reveals that the dominant frequencies are at low and medium range, and this fact further suggests that machine vibration and its transmitting path isolation should be the effective way for engineering control on noise reduction.