Laser Patterning on the ITO Film Using DPSS and Femtosecond Laser

Laser patterning technology has been widely used to manufacture the electrode of display. Because flexible display is a trend, substrate material will play a key role to affect ablated quality of the electrode. In this report, the ablated effect of indium tin oxide coated on traditional glass substrate and polyethylene terephthalate substrate is presented. The edge of the ablated sections was observed the melt ridge build-up on both samples after patterning these ITO/glass and ITO/PET materials. Experimental results indicated that the edge of the ablated sections was relative to energy density and overlap of the laser. The optimal ablated quality of the electrode will also be reported.