超大型積體電路技術實習課程學習成效評估之研究

The study one valuating learning efficiency for the practice course of VLSI technology

本研究首先建立一套半導體元件製程與特性分析之實習課程教材然後評估此教學系統之學習成效，透過簡至繁的漸進方式將半導體單元製程與元件特性模擬模組化以提升教學成效。本教學系統的內容主要涵蓋半導體元件製程與元件特性。課程教學的進行方式是以投影片簡報課堂講演、多媒體螢幕暨簡報錄影播放與動畫演示暨漸進式與模組化的半導體工藝電腦輔助設計軟體之電腦模擬實習，引導學生進行學習活動，讓學生對半導體元件製程與元件特性有全面性的認識。以合作學習（引導學生形成討論組/模擬實作組）為輔助，強化整體教學系統的效能。此教學系統落實於大學部之專業課程以提昇學生在半導體元件製程與元件特性上的專業認知而達到縮短知行差距（knowing-doing gap）之目標。本研究亦透過課程教學之實施逐步建立多媒體之課程教材、製程動畫、電腦模擬範例程式與操作示範動畫，將相關之課程教材與講義上傳至本校之數位學習系統亦可分享於網際網路中。學生於數位學習系統中“討論區”發表心得與討論，透過系統中“線上測驗”與“問卷”的功能對學生之學習成效進行評估以獲得即時之回饋訊息作為教學之改進。

The objective of this study is first to build up an instructional system of the practice course of semiconductor-device manufacturing processes and characteristics analysis, and then evaluate the learning effectiveness of the system. Learning performance of students will be promoted step by step with modular simulation of semiconductor unit process and devices characteristics from simple to complicated cases. The instructional system includes the introduction of semiconductor-device manufacturing processes and devices characteristics. In order to help students completely comprehend the semiconductor-device manufacturing processes and devices characteristics, several teaching techniques including oral lectures with multimedia, animations, and software demonstration are introduced in this system. A progressive and modular method has been proposed to assist students in the learning of subjects on the techniques of semiconductor-device manufacturing processes and devices characteristics. In addition, the cooperative learning is used to increase the performances of the proposed instructional system. This instructional system was implemented in undergraduate-level professional courses. According to the scheme of simulation program and the visualization effects shown on the screen, course materials with technology-literacy of semiconductor-device manufacturing processes and devices characteristics can be developed and reach the goal of reducing knowing-doing gap. The multimedia instructional materials, flash animations, demo program for simulation, and demo animations of computer simulation were developed while the courses are carrying on. These instructional materials can be uploaded on the e-learning platform of our school and shared as an opened digital instructional platform. Students can discuss the simulation results by using the 'discussion area' on this e-learning platform, and the function of 'online test' and 'online questionnaire'of this e-learning platform can feedback the messages for teacher to improve this instructional system.