Microring Resonator Based on 3x3 General Multimode Interference Structures Using Silicon Waveguides for Highly Sensitive Sensing and Optical Communication Applications

In this paper, the realization and design of a novel waveguide microring resonator for biological and chemical sensing are presented. The structure of the proposed sensor uses a 3x3 multimode interference (MMI) coupler based on silicon waveguides for highly sensitivity, compactness and CMOS compatibility. The Fano resonances based on this structure can be achieved. As a result, sensors based on the proposed device can provide high sensitivity. In addition, many useful optical functions such as all-optical switches, filters and single-mode lasers can be realized using the proposed Fano-type transmission device. The transfer matrix method (TMM) and beam propagation method (BPM) are used to optimally design the sensor structure.